sti field oxide
WithitszerooxidefieldencroachmentSTIismoresuitablefortheincreaseddensityrequirements,becauseitallowstoformsmallerisolationregions.The ...,由KShiozawa著作·1999·被引用9次—WeconcludedthatSTI,inwhichtheoriginalfieldoxideabruptlyprojectsabovethesubstr...
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急迫發展克服先進STI製程的關鍵。高選擇比研漿的選用、線性研磨製程(Linear...陷(OxideDishing),而在較大寬度氮化.矽終止層上仍有殘留氧化矽(Residual.Oxide)未被 ...
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